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Proceedings Paper

Micro-structure characterization based on white light interferometry
Author(s): Tong Guo; Ying Zhang; Si-ming Wang; Long Ma; Xing Fu; Xiao-tang Hu
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Paper Abstract

White light interferometry(WLI) has grown to be a standard measurement method in the field of micro/nano manufacture. Vertical white light scanning interferometry(VSI), tilt white light scanning interferometry(TSI) and white light phase shifting interferometry(WLPSI) are introduced in this paper. A new algorithm based on the combination of VSI and image segmentation technology for measuring the film is presented in this paper. TSI is taken place of VSI for expanding its lateral measuring range and improving the testing efficiency as the vertical and lateral information of the samples are obtained after one time scan. Carré phase shifting is combined with vertical white light scanning which formed a white light phase shifting method. The measurement system equips a Mirau microscopic interferometer, and the scanning process is driven by nano-measuring machine(NNM) which is a high precision nano-positioner. At last, the testing results of some micro-structures illustrate the capabilities of the proposed algorithms.

Paper Details

Date Published: 15 November 2011
PDF: 6 pages
Proc. SPIE 8335, 2012 International Workshop on Image Processing and Optical Engineering, 833509 (15 November 2011); doi: 10.1117/12.917822
Show Author Affiliations
Tong Guo, Tianjin Univ. (China)
Ying Zhang, Tianjin Univ. (China)
Si-ming Wang, Tianjin Univ. (China)
Long Ma, Tianjin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Xiao-tang Hu, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 8335:
2012 International Workshop on Image Processing and Optical Engineering
Hai Guo; Qun Ding, Editor(s)

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