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Proceedings Paper

A primer of physical design for lithographers
Author(s): Chi-Min Yuan
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Paper Abstract

In the SPIE Microlithography DFM conference, the number of papers related to physical design has been steadily increasing in the last few years. Since the majority of the audience in this conference has a background in lithography, some of the physical design-related terminologies and methods described in the presentation may be hard to understand. This paper gives a basic introduction to the physical design that is applicable to lithographers. The goal of the paper is not to enable a lithographer to begin working as a physical designer. Instead, it is to help lithographers understand some of the basics of physical design, so that they can better comprehend other DFM papers presented at the conference.

Paper Details

Date Published: 14 March 2012
PDF: 8 pages
Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270E (14 March 2012); doi: 10.1117/12.917447
Show Author Affiliations
Chi-Min Yuan, Freescale Semiconductor, Inc. (United States)

Published in SPIE Proceedings Vol. 8327:
Design for Manufacturability through Design-Process Integration VI
Mark E. Mason, Editor(s)

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