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Proceedings Paper

Interferometric study of deformation fields arising at laser treatment of Si surface
Author(s): Mykola D. Raransky; Vitaliy N. Balazyuk; Mykola I. Melnyk; Bohdan M. Grytsyuk
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Paper Abstract

This work studies displacement and deformation fields in Si arising at radiation with neodymium laser beam of energy ~1 J and pulse duration 10-3 s. Investigations were performed using moiré fringe method with employment of X-ray interferometer based on the LLL-diffraction pattern.

Paper Details

Date Published: 22 November 2011
PDF: 6 pages
Proc. SPIE 8338, Tenth International Conference on Correlation Optics, 83380V (22 November 2011); doi: 10.1117/12.917092
Show Author Affiliations
Mykola D. Raransky, Yuriy Fedkovych Chernivtsi National Univ. (Ukraine)
Vitaliy N. Balazyuk, Yuriy Fedkovych Chernivtsi National Univ. (Ukraine)
Mykola I. Melnyk, Yuriy Fedkovych Chernivtsi National Univ. (Ukraine)
Bohdan M. Grytsyuk, Yuriy Fedkovych Chernivtsi National Univ. (Ukraine)


Published in SPIE Proceedings Vol. 8338:
Tenth International Conference on Correlation Optics
Oleg V. Angelsky, Editor(s)

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