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Proceedings Paper

Improved flexibility with grayscale fabrication of calcium fluoride homogenizers
Author(s): Jeremiah Brown; Peter Brakhage; Lamarr Simmons; Ralf Mueller
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Paper Abstract

High quality and highly uniform illumination is a critical component for advanced lithography systems and wafer inspection tools. Homogenizer elements fabricated in calcium fluoride have demonstrated good performance for deep UV applications. Grayscale photolithography allows for the fabrication of single-sided micro lens array (MLA) elements with excellent optical performance. The MLA offers some significant advantages over crossed cylinders fabricated using grayscale photolithography processes, including the reduction in the number of fabrication steps and the added flexibility of manufacturing noncylindrical surface geometries. This research presentation reviews the fabrication process and compares grayscale crossed cylindrical arrays and MLAs in terms of their capabilities and performance.

Paper Details

Date Published: 13 March 2012
PDF: 10 pages
Proc. SPIE 8326, Optical Microlithography XXV, 83261Z (13 March 2012); doi: 10.1117/12.916504
Show Author Affiliations
Jeremiah Brown, JENOPTIK Optical Systems, Inc. (United States)
Peter Brakhage, JENOPTIK Optical Systems GmbH (Germany)
Lamarr Simmons, JENOPTIK Optical Systems, Inc. (United States)
Ralf Mueller, JENOPTIK Optical Systems GmbH (Germany)

Published in SPIE Proceedings Vol. 8326:
Optical Microlithography XXV
Will Conley, Editor(s)

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