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Proceedings Paper

Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media
Author(s): Takeshi Okino; Takuya Shimada; Akiko Yuzawa; Ryosuke Yamamoto; Naoko Kihara; Yoshiyuki Kamata; Akira Kikitsu; Takashi Akahane; You Yin; Sumio Hosaka
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Paper Abstract

Bit patterned media (BPM) is a promising candidate for next-generation magnetic recording media beyond 2.5 Tb/in2. To realize such high-density patterned media, directed self-assembling (DSA) technology is a possible solution to form fine dots. In order to read and write magnetic signals on a magnetic dot of magnetic media, the position of magnetic dots must be controlled. We examined ordering of directed self-assembly of diblock copolymer dots with a variety of prepatterned guides in some conditions and evaluated the ordering of the dots by using Delaunay triangulation and Voronoi diagram. Applying the optimized conditions, we obtained highly controlled dot pattern suitable for magnetic recording media.

Paper Details

Date Published: 21 March 2012
PDF: 8 pages
Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83230S (21 March 2012); doi: 10.1117/12.916304
Show Author Affiliations
Takeshi Okino, Toshiba Corp. (Japan)
Takuya Shimada, Toshiba Corp. (Japan)
Akiko Yuzawa, Toshiba Corp. (Japan)
Ryosuke Yamamoto, Toshiba Corp. (Japan)
Naoko Kihara, Toshiba Corp. (Japan)
Yoshiyuki Kamata, Toshiba Corp. (Japan)
Akira Kikitsu, Toshiba Corp. (Japan)
Takashi Akahane, Gunma Univ. (Japan)
You Yin, Gunma Univ. (Japan)
Sumio Hosaka, Gunma Univ. (Japan)

Published in SPIE Proceedings Vol. 8323:
Alternative Lithographic Technologies IV
William M. Tong, Editor(s)

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