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Proceedings Paper

Alignment method in plasmonic lithography with a contact optical scanning probe at resonant condition
Author(s): Seonghyeon Oh; Taekyeong Lee; Jae W. Hahn
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Paper Details

Date Published:
Proc. SPIE 8323, Alternative Lithographic Technologies IV, 83231F; doi: 10.1117/12.916279
Show Author Affiliations
Seonghyeon Oh, Yonsei Univ. (Korea, Republic of)
Taekyeong Lee, Yonsei Univ. (Korea, Republic of)
Jae W. Hahn, Yonsei Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 8323:
Alternative Lithographic Technologies IV
William M. Tong, Editor(s)

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