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Proceedings Paper

Synthesis and photopolymerization kinetics of a novel oxime ester sulfonic acid photoacid generator
Author(s): Yu-Lian Pang; Ying-Quan Zou
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Paper Abstract

On the basis of the chemical structure of (5-Hydroxyimino-5H-thiophen-2-ylidene)-phenylacetonitrile, we synthesized a novel sulfonic oxime ester photoacid generator named (5-Ptoluenesulfonyloxyimino- 5H-thiophen-2-ylidene)-phenyl-acetonitrile (TTPA),which was an efficient Photoacid generator (PAG) for 405nm violet laser imaging system.It was synthesized from 2- Nitrothiophen ,Phenylqceto-nitrile and P-toluenesulfonyl chloride.TTPA was characterized by FTIR1HNMR and UV absorption spectra. Real time infrared spectroscopy(RTIR) was used to investigate the effect of different monomers system and different concentrations of TTPA on the polymerization kinetics. The results showed that with the concentration of TTPA increase, with limits, the rate of photopolymerization(Rp) and final double bond conversion increased and the induction period shortened.

Paper Details

Date Published: 20 March 2012
PDF: 9 pages
Proc. SPIE 8325, Advances in Resist Materials and Processing Technology XXIX, 83251Q (20 March 2012); doi: 10.1117/12.916239
Show Author Affiliations
Yu-Lian Pang, Beijing Normal Univ. (China)
Ying-Quan Zou, Beijing Normal Univ. (China)


Published in SPIE Proceedings Vol. 8325:
Advances in Resist Materials and Processing Technology XXIX
Mark H. Somervell; Thomas I. Wallow, Editor(s)

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