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Proceedings Paper

Design and manufacturability tradeoffs in unidirectional and bidirectional standard cell layouts in 14 nm node
Author(s): Kaushik Vaidyanathan; Siew Hoon Ng; Daniel Morris; Neal Lafferty; Lars Liebmann; Mitchell Bender; Wenbin Huang; Kafai Lai; Larry Pileggi; Andrzej Strojwas
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Paper Abstract

The 14 nm node is seeing the dominant use of three-dimensional FinFET architectures, local interconnects, multiple patterning processes and restricted design rules. With the adoption of these new process technologies and design styles, it becomes necessary to rethink the standard cell library design methodologies that proved successful in the past. In this paper, we compare the design efficiency and manufacturability of standard cell libraries that use either unidirectional or bidirectional Metal 1. In contrast to previous nodes, a 14 nm 9-track unidirectional standard cell layout results in up to 20% lower energy-delay-area product as compared to the 9-track bidirectional standard cell layout. Manufacturability assessment shows that the unidirectional standard cell layouts save one exposure on Metal 1, reduces process variability by 10% and layout construct count by 2-3X. As a result, the unidirectional standard cell layout could serve as a key enabler for affordable scaling.

Paper Details

Date Published: 15 March 2012
PDF: 12 pages
Proc. SPIE 8327, Design for Manufacturability through Design-Process Integration VI, 83270K (15 March 2012); doi: 10.1117/12.916104
Show Author Affiliations
Kaushik Vaidyanathan, Carnegie Mellon Univ. (United States)
Siew Hoon Ng, Carnegie Mellon Univ. (United States)
Daniel Morris, Carnegie Mellon Univ. (United States)
Neal Lafferty, IBM Corp. (United States)
Lars Liebmann, IBM Corp. (United States)
Mitchell Bender, Carnegie Mellon Univ. (United States)
Wenbin Huang, Carnegie Mellon Univ. (United States)
Kafai Lai, IBM Corp. (United States)
Larry Pileggi, Carnegie Mellon Univ. (United States)
Andrzej Strojwas, Carnegie Mellon Univ. (United States)


Published in SPIE Proceedings Vol. 8327:
Design for Manufacturability through Design-Process Integration VI
Mark E. Mason, Editor(s)

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