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Proceedings Paper

The filter adsorption mechanism in photoresist materials
Author(s): Tetsu Kohyama
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Paper Abstract

Recently nylon filters have been widely implemented in photolithography processes to improve the yields because many IC and photoresist manufacturers have empirical evidence indicating that the nylon membrane can adsorb impurities. However, the mechanism by which the nylon membrane reduces defects is unclear. It is useful to study different defect-causing mechanisms by focusing on the particular components of photoresists. In this paper various adsorption tests were performed utilizing surface modification and different photoresist components to measure the effect of nylon membranes on resist properties, including surface tension, PAG (photoacid generator) concentration and quencher concentration. Ultimately, the study hopes to determine the most effective way to increase yields by focusing on how to best implement a nylon filtration strategy.

Paper Details

Date Published: 19 March 2012
PDF: 11 pages
Proc. SPIE 8325, Advances in Resist Materials and Processing Technology XXIX, 83252I (19 March 2012); doi: 10.1117/12.916082
Show Author Affiliations
Tetsu Kohyama, Nihon Entegris K. K. (Japan)

Published in SPIE Proceedings Vol. 8325:
Advances in Resist Materials and Processing Technology XXIX
Mark H. Somervell; Thomas I. Wallow, Editor(s)

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