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Proceedings Paper

Effects of surface electric field on SnO2 room temperature gas sensors fabricated on nanospike substrates
Author(s): Haizhou Ren; Pengtao Wang; Haibin Huo; Mengyan Shen; Marina Ruths; Hongwei Sun
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Paper Abstract

SnO2 thin film room-temperature gas sensors have been fabricated on silicon nanospike surfaces prepared by femtosecond pulsed laser irradiation. The surface morphologies of the as-fabricated silicon nanospikes and SnO2 thin film gas sensors indicate that the surface roughness increased significantly after the SnO2 layer was deposited. The surface morphology and electric field distribution of the silicon nanospikes were studied with atomic force microscopy (AFM) and the electric force microscopy (EFM), respectively. The comparison between AFM morphology and EFM images shows that the aspect ratio of the nanostructures in the EFM image was larger than that in the AFM image, which indicates that the nanospikes on the silicon surface can induce an enhanced electric field around their sharp features. The electric field around the tips is further enhanced when there is electric current flowing through the SnO2 layer. The enhanced electric field and increased surface area on the nanospike structures are the main contributors to the high sensitivity of these room temperature gas sensors.

Paper Details

Date Published: 6 April 2012
PDF: 6 pages
Proc. SPIE 8345, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2012, 83454T (6 April 2012); doi: 10.1117/12.915141
Show Author Affiliations
Haizhou Ren, Univ. of Massachusetts Lowell (United States)
Pengtao Wang, Univ. of Massachusetts Lowell (United States)
Haibin Huo, Univ. of Massachusetts Lowell (United States)
Mengyan Shen, Univ. of Massachusetts Lowell (United States)
Marina Ruths, Univ. of Massachusetts Lowell (United States)
Hongwei Sun, Univ. of Massachusetts Lowell (United States)


Published in SPIE Proceedings Vol. 8345:
Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2012
Masayoshi Tomizuka; Chung-Bang Yun; Jerome P. Lynch, Editor(s)

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