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Proceedings Paper

Design and analysis of a 10GHz LC-VCO using MEMS inductor
Author(s): N. Khalid; K. Shah; J. Singh; N. Izza M. Nor; Z. Sauli
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Paper Abstract

This paper presents design and analysis of a 10GHz inductance-capacitance (LC)-Voltage-Controlled Oscillators (VCO) implemented with a very high quality (Q) factor on-chip Micro-Electro-Mechanical Systems (MEMS) inductor using 0.25μm silicon-on-sapphire (SOS) technology. A new symmetric topology of suspended MEMS inductor is proposed to reduce the length of the conductor strip and achieve the lowest series resistance in the metal tracks. This MEMS inductor has been suspended above the high resistivity SOS substrate to minimise the substrate loss and therefore, achieve a very high Q-factor inductor. A maximum Q-factor of 191.99 at 11.7GHz and Q-factor of 189 at 10GHz has been achieved for a 1.13nH symmetric MEMS inductor. The proposed inductor has been integrated with a VCO on the same substrate using the Metal layers in SOS technology removing the need for additional bond wire. The 10GHz LC-VCO has achieved a phase noise of -116.27dBc/Hz and -126.19dBc/Hz at 1MHz and 3MHz of offset frequency, respectively. It consumes 4.725mW of power from 2.5V supply voltage while achieving a Figure of Merit (FOM) of -189.5dBc/Hz.

Paper Details

Date Published: 9 May 2012
PDF: 12 pages
Proc. SPIE 8341, Active and Passive Smart Structures and Integrated Systems 2012, 83411Q (9 May 2012); doi: 10.1117/12.914755
Show Author Affiliations
N. Khalid, La Trobe Univ. (Australia)
Univ. Malaysia Perlis (Malaysia)
K. Shah, La Trobe Univ. (Australia)
J. Singh, La Trobe Univ. (Australia)
N. Izza M. Nor, La Trobe Univ. (United States)
Univ. Malaysia Perlis (Malaysia)
Z. Sauli, Univ. Malaysia Perlis (Malaysia)

Published in SPIE Proceedings Vol. 8341:
Active and Passive Smart Structures and Integrated Systems 2012
Henry A. Sodano, Editor(s)

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