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Proceedings Paper

Application of infrared ATR ellipsometry for measurement of solid samples: calibration procedure
Author(s): Zuzana Mrázková; David Hrabovský; Kamil Postava; Jaromír Pištora
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Paper Abstract

Attenuated total reflection (ATR) is widely used in infrared spectral range for measurement of surface properties of solid samples, powders, and liquids. In this paper we use a commercial Fourier-transform infrared (FTIR) spectrometer Vertex 70v from Bruker company equipped with the ATR Golden Gate accessory from Specac. To increase sensitivity of the method we included infrared polarizer and analyzer, which enable measurement of the reflected amplitudes ratio and the phase differences between p- and s-polarizations in the frame of the ATR ellipsometry. Procedure of ellipsometric angles measurement is proposed using data acquisition at several azimuthal angles of polarizers. Spectral dependence of real polarizer extinction ratio, partial polarization of beam coming from the interferometer and polarization sensitivity of infrared detector are presented.

Paper Details

Date Published: 11 October 2011
PDF: 7 pages
Proc. SPIE 8306, Photonics, Devices, and Systems V, 83060S (11 October 2011); doi: 10.1117/12.914242
Show Author Affiliations
Zuzana Mrázková, Technical Univ. of Ostrava (Czech Republic)
David Hrabovský, Technical Univ. of Ostrava (Czech Republic)
Kamil Postava, Technical Univ. of Ostrava (Czech Republic)
Jaromír Pištora, Technical Univ. of Ostrava (Czech Republic)


Published in SPIE Proceedings Vol. 8306:
Photonics, Devices, and Systems V
Pavel Tománek; Dagmar Senderáková; Petr Páta, Editor(s)

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