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Proceedings Paper

Thermo-mechanical properties of a deformable mirror with screen printed actuator
Author(s): C. Bruchmann; M. Appelfelder; E. Beckert; R. Eberhardt; A. Tünnermann
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Paper Abstract

This paper reports on the thermo-mechanical modeling and characterization of a screen printed deformable mirror. The unimorph mirror offers a ceramic LTCC substrate with screen printed PZT layers on its rear surface and a machined copper layer on its front surface. We present the thermo-mechanical model of the deformable mirror based on Ansys multiphysics. The developed mirror design is practically characterized. The homogeneous loading of the optimized design results in a membrane deformation with a rate of -0.2 μm/K, while a laser loading causes a change with a rate of 1.3 μm/W. The proposed mirror design is also suitable to pre-compensate laser generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35 K pre-heating of the mirror assembly could compensate an absorbed laser power of 1.25 W.

Paper Details

Date Published: 15 February 2012
PDF: 11 pages
Proc. SPIE 8253, MEMS Adaptive Optics VI, 82530D (15 February 2012); doi: 10.1117/12.912614
Show Author Affiliations
C. Bruchmann, Friedrich-Schiller-Univ. Jena (Germany)
Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
M. Appelfelder, Friedrich-Schiller-Univ. Jena (Germany)
E. Beckert, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
R. Eberhardt, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
A. Tünnermann, Friedrich-Schiller-Univ. Jena (Germany)
Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 8253:
MEMS Adaptive Optics VI
Scot S. Olivier; Thomas G. Bifano; Joel Kubby, Editor(s)

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