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Proceedings Paper

Development of high-order segmented MEMS deformable mirrors
Author(s): Michael A. Helmbrecht; Min He; Carl J. Kempf
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Paper Abstract

The areas of biological microscopy, ophthalmic research, and atmospheric turbulence correction require high-order DMs to obtain diffraction-limited images. Iris AO has been developing high-order MEMS DMs to address these requirements. Recent development has resulted in fully functional 489-actuator DMs capable of 9.5 µm stroke. For laser applications, the DMs were modified to make them compatible with high-reflectance dielectric coatings. Experimental results for the 489-actuator DMs with dielectric coatings shows they can be made with superb optical quality λ/93.3 rms (11.4 nm rms) and λ/75.9 rms (20.3 nm rms) for 1064 nm and 1540 nm coatings. Laser testing has demonstrated 300 W/cm2 power handling with off-the-shelf packaging. Power handling of 2800 W/cm2 is projected when incorporating packaging optimized for heat transfer.

Paper Details

Date Published: 15 February 2012
PDF: 5 pages
Proc. SPIE 8253, MEMS Adaptive Optics VI, 825307 (15 February 2012); doi: 10.1117/12.912547
Show Author Affiliations
Michael A. Helmbrecht, Iris AO, Inc. (United States)
Min He, Iris AO, Inc. (United States)
Carl J. Kempf, Iris AO, Inc. (United States)


Published in SPIE Proceedings Vol. 8253:
MEMS Adaptive Optics VI
Scot S. Olivier; Thomas G. Bifano; Joel Kubby, Editor(s)

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