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Proceedings Paper

Laser processing with ultrashort vortex pulses
Author(s): Cyril Hnatovsky; Vladlen G. Shedov; Wieslaw Z. Krolikowski; Andrei V. Rode
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Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430L; doi: 10.1117/12.911801
Show Author Affiliations
Cyril Hnatovsky, The Australian National Univ. (Australia)
Vladlen G. Shedov, The Australian National Univ. (Australia)
Wieslaw Z. Krolikowski, The Australian National Univ. (Australia)
Andrei V. Rode, The Australian National Univ. (Australia)


Published in SPIE Proceedings Vol. 8243:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata, Editor(s)

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