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Proceedings Paper

Deformable mirror with controlled air damping for fast focus tracking and scanning
Author(s): Mohammad J. Moghimi; Krishna Chattergoon; Chris Wilson; David L. Dickensheets
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Paper Abstract

Air flow is the dominant damping mechanism for deformable membrane mirrors that are actuated with electrostatic pressure from a counter electrode in close proximity to the flexible membrane. We use cryogenic deep silicon etching to create through-wafer perforations in the backplate in order to control air damping and achieve high-speed focus control. This paper describes both our design approach and device fabrication details. We show that damping can be controlled by selecting the proper hole pattern, and we present experimental and simulated frequency response measurements for small membrane displacements. Also we measured the 95% settling time of a 4 mm diameter mirror subjected to a 10 μm step deflection to be less than 200 μs.

Paper Details

Date Published: 15 February 2012
PDF: 9 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520M (15 February 2012); doi: 10.1117/12.910977
Show Author Affiliations
Mohammad J. Moghimi, Montana State Univ. (United States)
Krishna Chattergoon, Montana State Univ. (United States)
Chris Wilson, Bridger Photonics, Inc. (United States)
David L. Dickensheets, Montana State Univ. (United States)

Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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