Share Email Print

Proceedings Paper

MEMS deformable mirror actuators with enhanced reliability
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

MEMS deformable mirrors with thousands of actuators are under development for space-based operation, which require fault tolerant actuators that will not fail due to electrical overstress. We report on advances made in the development of MEMS deformable mirror actuators with enhanced reliability for space-based, high-contrast imaging instrumentation that eliminate irreversible actuator damage resulting from snap-through.

Paper Details

Date Published: 15 February 2012
PDF: 7 pages
Proc. SPIE 8253, MEMS Adaptive Optics VI, 825306 (15 February 2012); doi: 10.1117/12.910742
Show Author Affiliations
S. A. Cornelissen, Boston Micromachines Corp. (United States)
T. G. Bifano, Boston Micromachines Corp. (United States)
Boston Univ. (United States)
P. A. Bierden, Boston Micromachines Corp. (United States)

Published in SPIE Proceedings Vol. 8253:
MEMS Adaptive Optics VI
Scot S. Olivier; Thomas G. Bifano; Joel Kubby, Editor(s)

© SPIE. Terms of Use
Back to Top