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Proceedings Paper

Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head
Author(s): Jan Grahmann; Michael Wildenhain; Thomas Grasshoff; Christian Gerwig; Hans-Georg Dallmann; Alexander Wolter; Harald Schenk
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Paper Abstract

A Scan Head package including two 1D resonant electrostatic driven micro scanning mirrors with piezoresistive position detection was developed. The scanning frequency of the slow and the fast axis is 100Hz and 29,05kHz, allowing WVGA-resolution. Thereby the Scan Head design reduces vertical distortion strongly and can potentially be assembled automatically. In addition FPGA based video processing electronic was developed to improve the sorting of the picture information corresponding to the Lissajous figure with the objective of high picture contrast and a homogeneous brightness.

Paper Details

Date Published: 15 February 2012
PDF: 9 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 825205 (15 February 2012); doi: 10.1117/12.910671
Show Author Affiliations
Jan Grahmann, Fraunhofer Institute for Photonic Microsystems (Germany)
Michael Wildenhain, Fraunhofer Institute for Photonic Microsystems (Germany)
Thomas Grasshoff, Fraunhofer Institute for Photonic Microsystems (Germany)
Christian Gerwig, Fraunhofer Institute for Photonic Microsystems (Germany)
Hans-Georg Dallmann, Fraunhofer Institute for Photonic Microsystems (Germany)
Alexander Wolter, HiperScan GmbH (Germany)
Harald Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)


Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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