Share Email Print
cover

Proceedings Paper

A miniature extrinsic fiber Fabry-Perot pressure sensor based on fiber etching
Author(s): Yixian Ge; Junping Zhou; Tingting Wang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

A miniature fiber optic pressure sensor based on Fabry-Perot interference fabricated on the tip of a single mode (SM) fiber is presented. The sensor measures only 125μm in diameter. A Fabry-Perot cavity and a thin silica diaphragm are fabricated by simple techniques involving only cleaving, wet chemical etching and fusion splicing. Interference pattern of the sensor is analyzed and issues in sensor design are discussed. The overall chemical reaction of the fiber wet etching is specifically represented. Pressure testing system is carried out. By tracing a peak point in the interference spectrum, the gap length of the sensor can be demodulated. Experimental results show the sensor has a good linearity. The sensor is made entirely of fused silica, whose structure has good stability, cabinet, simple for fabrication and low cost.

Paper Details

Date Published: 23 November 2011
PDF: 6 pages
Proc. SPIE 8199, 2011 International Conference on Optical Instruments and Technology: Optical Sensors and Applications, 81991L (23 November 2011); doi: 10.1117/12.910383
Show Author Affiliations
Yixian Ge, Nanjing Univ. of Information Science & Technology (China)
Junping Zhou, Nanjing Univ. of Information Science & Technology (China)
Tingting Wang, Nanjing Univ. of Information Science & Technology (China)


Published in SPIE Proceedings Vol. 8199:
2011 International Conference on Optical Instruments and Technology: Optical Sensors and Applications
Brian Culshaw; YanBiao Liao; Anbo Wang; Xiaoyi Bao; Xudong Fan, Editor(s)

© SPIE. Terms of Use
Back to Top