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Proceedings Paper

Incubation effect of laser-induced surface damage of HfO2/SiO2 HR coating in the femto-nanosecond region
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Paper Abstract

This paper is devoted to a long-term investigation into the nature of incubation effect of multilayer dielectric HR mirror coatings. Accumulated damage behaviors of HfO2/SiO2 mirrors for 800nm, 1053nm, and 1064nm, both fabricated by conventional electron beam evaporation (EBE), were investigated by ultra-short pulse (800nm/~100fs), short pulse (1053nm/~1ps), and long pulse (1064nm/~10ns) lasers, respectively. Incubation effect was found to be a universal phenomenon for HfO2/SiO2 mirrors irradiating by the femto-nanosecond lasers. And when the shot number was about 100, the multi-pulse damage threshold of samples decreased to the level of 60~70% of the single-pulse threshold. Typical damage morphologies and depths information of HR samples were characterized by optical microscope and surface profiler. The results revealed that the electric field distribution within the mirrors had significant influence on the initial damage onset of the mirrors. In addition, theoretical simulation was carried out to describe the incubation behaviors of HfO2/SiO2 mirrors in the femto- and nano-second regions. It seemed reasonable that incubation effect was attributed to the accumulation of native or laser-induced electronic trapping states.

Paper Details

Date Published: 12 January 2012
PDF: 9 pages
Proc. SPIE 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, 82060W (12 January 2012); doi: 10.1117/12.910353
Show Author Affiliations
Shunli Chen, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of Chinese Academy of Sciences (China)
Yuanan Zhao, Shanghai Institute of Optics and Fine Mechanics (China)
Fanyu Kong, Shanghai Institute of Optics and Fine Mechanics (China)
Graduate School of Chinese Academy of Sciences (China)
Dawei Li, Shanghai Institute of Optics and Fine Mechanics (China)
Hongbo He, Shanghai Institute of Optics and Fine Mechanics (China)
Jianda Shao, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 8206:
Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers
Jianda Shao, Editor(s)

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