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Proceedings Paper

Evaluation of damping ratio in a glass-based guided-wave optical microphone with a diaphragm
Author(s): Masashi Ohkawa; Kazuya Murata; Takashi Sato
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Paper Abstract

In a guided-wave optical microphone with a diaphragm used as a vibration plate, damping of diaphragm vibration is very significant in order to realize broad flat frequency response. In this study, a glass-based guided-wave optical microphone without a damping structure was experimentally examined to evaluate the damping ratio as the first phase in the optimization of damping. Damping ratio and resonance frequency were successfully evaluated to be 0.009 and 3.5 kHz, respectively, for a fabricated microphone with a diaphragm of 20 mm × 20 mm × 0.15 mm.

Paper Details

Date Published: 1 February 2012
PDF: 6 pages
Proc. SPIE 8264, Integrated Optics: Devices, Materials, and Technologies XVI, 82641I (1 February 2012); doi: 10.1117/12.910286
Show Author Affiliations
Masashi Ohkawa, Niigata Univ. (Japan)
Kazuya Murata, Niigata Univ. (Japan)
Takashi Sato, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 8264:
Integrated Optics: Devices, Materials, and Technologies XVI
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)

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