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Proceedings Paper

Beam scanning laser interferometer with high spatial resolution over a large field of view
Author(s): Osami Sasaki; Tsuyoshi Saito; Samuel Choi; Takamasa Suzuki
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Paper Abstract

It is difficult in interferometric metrology to maintain high spatial resolution over a large field of view. In this paper this characteristic is achieved by scanning two focused laser beams over an object surface and a reference mirror surface, respectively, with a rotating mirror, a lens, and a polarization beam splitter. An electric-optic phase modulator generates the phase difference of a sinusoidal waveform of 10 MHz between the two focused beams. Sinusoidal phase-modulating interferometry is used to calculate the phase of the interference signal caused by the two focused beams. The scanning speed of the beams is 20 m/s, and the sampling interval of the interference signal is 1/80 microseconds. The spatial resolution is 2.0 microns over the measurement region of 18.8mm. The measurement results show that the measurement error is less than 5nm.

Paper Details

Date Published: 30 November 2011
PDF: 7 pages
Proc. SPIE 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 82010J (30 November 2011); doi: 10.1117/12.910102
Show Author Affiliations
Osami Sasaki, Niigata Univ. (Japan)
Tsuyoshi Saito, Niigata Univ. (Japan)
Samuel Choi, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)


Published in SPIE Proceedings Vol. 8201:
2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Xinyong Dong; Xiaoyi Bao; Perry Ping Shum; Tiegen Liu, Editor(s)

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