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Proceedings Paper

Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding
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Paper Abstract

Multi-object spectroscopy (MOS) allows measuring infrared spectra of faint astronomical objects that provides information on the evolution of the Universe. MOS requires a slit mask for object selection at the focal plane of the telescope. We are developing MEMS-based programmable reflective slit masks composed of 2048 individually addressable micromirrors. Each micromirror measures 100 × 200 μm2 and is electrostatically tilted by a precise angle of at least 20°. The main requirements for these arrays are precise and uniform tilt angle over the whole device, uniformity of the mirror electromechanical behavior, a flat mirror deformation and individual addressing capability of each mirror. This capability of our array is achieved using a line-column algorithm based on an optimized tilt angle/voltage hysteresis of the electrostatic actuator. Micromirror arrays composed of 2048 micromirrors (32 × 64) and modeled for individual addressing were fabricated using fusion and eutectic wafer-level bonding. These micromirrors without coating demonstrated a peak-to-valley deformation less than 8 nm and a tilt angle of 24° for an actuation voltage of 130 V. A first experiment of the linecolumn algorithm was demonstrated by actuating individually 2 × 2 micromirrors. In order, to avoid spoiling of the optical source by the thermal emission of the instrument, the micromirror array has to work in a cryogenic environment. Therefore, these devices were characterized in a cryogenic environment at -111°C and several lines of micromirrors were tilted successfully under these conditions.

Paper Details

Date Published: 15 February 2012
PDF: 10 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520B (15 February 2012); doi: 10.1117/12.910094
Show Author Affiliations
Michael Canonica, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Frederic Zamkotsian, Lab. d'Astrophysique de Marseille (France)
Patrick Lanzoni, Lab. d'Astrophysique de Marseille (France)
Wilfried Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Nico de Rooij, Ecole Polytechnique Fédérale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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