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Proceedings Paper

Effect of the deposition processes on the micro-defects and laser-induced damage threshold of thin films
Author(s): Dongping Zhang; Ping Fan; Guangxing Liang; Ting Zhang; Xingmin Cai; Rengui Huang
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Paper Abstract

Micro-defect is one of key limiting factors in the improvement of the laser-induced damage threshold (LIDT) of thin films. In the present paper, thin films were prepared using the electron-beam evaporation technique with different coating materials and pre-melting processes. The relationships of thin film LIDT with impurity element content and with pre-melting processes were investigated. The experiment results indicate that a number of impurity elements play an important role in the LIDT of the samples. An efficient pre-melting process is necessary to maintain deposition stability, which could also reduce micro-defect density in thin films.

Paper Details

Date Published: 12 January 2012
PDF: 6 pages
Proc. SPIE 8206, Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers, 82060O (12 January 2012); doi: 10.1117/12.909849
Show Author Affiliations
Dongping Zhang, Shenzhen Univ. (China)
Ping Fan, Shenzhen Univ. (China)
Guangxing Liang, Shenzhen Univ. (China)
Ting Zhang, Shenzhen Univ. (China)
Xingmin Cai, Shenzhen Univ. (China)
Rengui Huang, Shenzhen Univ. (China)


Published in SPIE Proceedings Vol. 8206:
Pacific Rim Laser Damage 2011: Optical Materials for High Power Lasers
Jianda Shao, Editor(s)

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