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Proceedings Paper

Ultra-high-precision surface structuring by synchronizing a galvo scanner with an ultra-short-pulsed laser system in MOPA arrangement
Author(s): B. Jaeggi; B. Neuenschwander; U. Hunziker; J. Zuercher; T. Meier; M. Zimmermann; K. H. Selbmann; G. Hennig
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Paper Abstract

For surface and 3D structuring the ultra short pulsed laser systems are mostly used in combination with galvo scanners. This work reports on the synchronization of the scanner mirror motion with the clock of the laser pulses, which is usually in the range of 100 kHz and higher, by a modification of the electronic scanner control. This synchronization facilitates the placement of the small ablation craters from single pulses with the precision of about 1 μm relative to each other. The precise control of the crater positions offers the possibility to test and optimize new structuring strategies. Results of this optimization process with respect to minimum surface roughness, steepness of wall, accuracy to shape and efficiency will be presented.

Paper Details

Date Published: 16 February 2012
PDF: 11 pages
Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82430K (16 February 2012); doi: 10.1117/12.909844
Show Author Affiliations
B. Jaeggi, Bern Univ. of Applied Sciences (Switzerland)
B. Neuenschwander, Bern Univ. of Applied Sciences (Switzerland)
U. Hunziker, Bern Univ. of Applied Sciences (Switzerland)
J. Zuercher, Bern Univ. of Applied Sciences (Switzerland)
T. Meier, Bern Univ. of Applied Sciences (Switzerland)
M. Zimmermann, Bern Univ. of Applied Sciences (Switzerland)
K. H. Selbmann, Bern Univ. of Applied Sciences (Switzerland)
G. Hennig, Daetwyler Graphics AG (Switzerland)


Published in SPIE Proceedings Vol. 8243:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata, Editor(s)

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