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Proceedings Paper

Generation of new nanostructures in designed matrix by interfering femtosecond laser processing
Author(s): K. Momoo; K. Sonoda; Y. Nakata; N. Miyanaga
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Paper Abstract

Huge numbers of 2D- or 3D- nanostructures can be generated by interfering ultra-short pulse laser processing in a single shot. Unit structures are nanowhiskers, nanoneedle, nanobump, nanomesh of metal. The distribution of these nanostructures are according to interference pattern, which can be controlled and designed by the number of beams, correlation angle, amplitude ratio and phase shifts between the beams. In this paper, we simulated the interference pattern with different combinations of these parameters. Our technique is useful for fabrication of metamaterials, in which designed unit structures are in designed periodic patterns.

Paper Details

Date Published: 16 February 2012
PDF: 9 pages
Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 82431E (16 February 2012); doi: 10.1117/12.909819
Show Author Affiliations
K. Momoo, Osaka Univ. (Japan)
K. Sonoda, Osaka Univ. (Japan)
Y. Nakata, Osaka Univ. (Japan)
N. Miyanaga, Osaka Univ. (Japan)


Published in SPIE Proceedings Vol. 8243:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata, Editor(s)

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