Share Email Print

Proceedings Paper

Spectroscopic ellipsometry: metrology for photovoltaics from the nanoscale to gigawatts
Author(s): Sylvain Marsillac; Robert W. Collins
Format Member Price Non-Member Price
PDF $17.00 $21.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Non-destructive, non-invasive measurement and monitoring tools, such as spectroscopic ellipsometry (SE), are needed at all scales of thin film photovoltaic (PV) technology development - from the nanometer scale that describes the electronic and physical structure of materials fabricated in research laboratories to the gigawatt scale that requires the large-area uniformity of materials made in mass production. In the research laboratory, real time SE during materials fabrication has provided insights into the structural and electronic property evolution, and dielectric functions of the thin films. Here we will present such results for the growth of thin film PV materials of various compositions and properties, including those used in the demanding I-III-VI2 solar cell technology. In the PV manufacturing plant, mapping SE can be used to evaluate the uniformity of thickness and properties of the layers in full scale PV panels and even in completed modules. Here we will present representative results for the uniformity of CdS, the window layer in CdTe PV technology, which reached 1.4 GW annual production in 2010.

Paper Details

Date Published: 21 February 2012
PDF: 11 pages
Proc. SPIE 8256, Physics, Simulation, and Photonic Engineering of Photovoltaic Devices, 825613 (21 February 2012); doi: 10.1117/12.909628
Show Author Affiliations
Sylvain Marsillac, Old Dominion Univ. (United States)
Robert W. Collins, The Univ. of Toledo (United States)

Published in SPIE Proceedings Vol. 8256:
Physics, Simulation, and Photonic Engineering of Photovoltaic Devices
Alexandre Freundlich; Jean-Francois F. Guillemoles, Editor(s)

© SPIE. Terms of Use
Back to Top