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Proceedings Paper

Characterization of a nanocoating using a MEMS tribogauge
Author(s): Ashwin Vijayasai; Gautham Ramachandran; Ganapathy Sivakumar; Charlie Anderson; Richard Gale; Tim Dallas
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Paper Abstract

A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.

Paper Details

Date Published: 15 February 2012
PDF: 9 pages
Proc. SPIE 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, 82500C (15 February 2012); doi: 10.1117/12.909335
Show Author Affiliations
Ashwin Vijayasai, Texas Tech Univ. (United States)
Gautham Ramachandran, Texas Tech Univ. (United States)
Ganapathy Sivakumar, Texas Tech Univ. (United States)
Charlie Anderson, Texas Tech Univ. (United States)
Richard Gale, Texas Tech Univ. (United States)
Tim Dallas, Texas Tech Univ. (United States)

Published in SPIE Proceedings Vol. 8250:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
Sonia M. García-Blanco; Rajeshuni Ramesham, Editor(s)

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