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Proceedings Paper

Design and analysis of a micromachined gyroscope
Author(s): Nilgoon Zarei; Albert Leung; John D. Jones
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Paper Abstract

This paper describes the simulation and design of a MEMS thermal gyroscope and optimizing the design for increased sensitivity through the use of the Comsol Multiphysics software package. Two different designs are described, and the effects of working fluid properties are explored. A prototype of this device has been fabricated using techniques for rapid prototyping of MEMS transducers.

Paper Details

Date Published: 14 February 2012
PDF: 6 pages
Proc. SPIE 8251, Microfluidics, BioMEMS, and Medical Microsystems X, 82510X (14 February 2012); doi: 10.1117/12.909171
Show Author Affiliations
Nilgoon Zarei, Simon Fraser Univ. (Canada)
Albert Leung, Simon Fraser Univ. (Canada)
John D. Jones, Simon Fraser Univ. (Canada)


Published in SPIE Proceedings Vol. 8251:
Microfluidics, BioMEMS, and Medical Microsystems X
Holger Becker; Bonnie L. Gray, Editor(s)

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