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Proceedings Paper

Optical characterization of high mobility polycrystalline ZnO:Al films
Author(s): Florian Ruske; Mark Wimmer; Grit Köppel; Andreas Pflug; Bernd Rech
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Paper Abstract

Optical methods are powerful and non-destructive means to characterize highly doped transparent conducting oxide thin films. In order to describe the optical properties of high-mobility ZnO films we present a dielectric function composed of different analytic expressions to describe the different contributions to the dielectric function of the films. This allows for the correct description of measured optical spectra and reduces the complex functions to a set of fitting parameters. In a second step we compare the obtained parameters to theoretical models. The basic theories are nicely reproduced and the basic link between optical and electrical properties can be understood. The findings can help on the route to a complete presiction of optical properties from the basic material properties or vice versa.

Paper Details

Date Published: 29 February 2012
PDF: 13 pages
Proc. SPIE 8263, Oxide-based Materials and Devices III, 826303 (29 February 2012); doi: 10.1117/12.908969
Show Author Affiliations
Florian Ruske, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Mark Wimmer, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Grit Köppel, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)
Andreas Pflug, Fraunhofer-Institut für Schicht- und Oberflächentechnik (Germany)
Bernd Rech, Helmholtz-Zentrum Berlin für Materialien und Energie GmbH (Germany)


Published in SPIE Proceedings Vol. 8263:
Oxide-based Materials and Devices III
Ferechteh H. Teherani; David C. Look; David J. Rogers, Editor(s)

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