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Proceedings Paper

Slow-light high contrast metastructure hollow-core waveguides
Author(s): Weimin Zhou; Gerard Dang; Monica Taysing-Lara; Vadim Karagodsky; Tianbo Sun; Connie Chang-Hasnain
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Paper Abstract

We present a new type of Si-based, metastructure, hollow-core waveguide that has highly desirable "slow-light" and low-loss properties for providing time-delays or high-Q cavities in chip-scale integrated OE circuits. This waveguide has high contrast grating (HCG) metastructures as the 4 claddings/walls of a squared hollow-core structure. We have successfully fabricated this 3-D metastructure waveguide using a new nano-fabrication techniques including one selfaligned, cycled, modified Bosch etch process. Our computational modeling indicates that there is a slow-light region with very little propagation loss. We will report our preliminary experimental waveguide test results for propagation loss and group velocity.

Paper Details

Date Published: 16 February 2012
PDF: 10 pages
Proc. SPIE 8270, High Contrast Metastructures, 827009 (16 February 2012); doi: 10.1117/12.908840
Show Author Affiliations
Weimin Zhou, U.S. Army Research Lab. (United States)
Gerard Dang, U.S. Army Research Lab. (United States)
Monica Taysing-Lara, U.S. Army Research Lab. (United States)
Vadim Karagodsky, Univ. of California, Berkeley (United States)
Tianbo Sun, Univ. of California, Berkeley (United States)
Connie Chang-Hasnain, Univ. of California, Berkeley (United States)

Published in SPIE Proceedings Vol. 8270:
High Contrast Metastructures
Connie J. Chang-Hasnain; Fumio Koyama; Alan Eli Willner; Weimin Zhou, Editor(s)

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