Share Email Print
cover

Proceedings Paper

A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators
Author(s): Sergio Camacho-León; Peter J. Gilgunn; Sergio O. Martínez-Chapa; Gary K. Fedder
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

This work reports the experimental validation of a novel one-dimensional microscanner. The composite cantilever device implements thermoelastic resonant actuation using temperature gradients induced across two frequency-selective directions as a strategy to increase operating speed and decrease damping. The device was fabricated using 0.35-μm CMOS technology and aspect ratio dependent etch modulation. Resonance peaks were measured around 6.4 and 44.7 kHz at atmospheric-pressure conditions; the power sensitivities (2.8 and 1.6 °/W) of the device may compromise its performance for low-power, large-angle applications. Ultimately, the device is suitable for applications requiring a variation from low- to high-stability conditions with increasing operating speed.

Paper Details

Date Published: 15 February 2012
PDF: 10 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520V (15 February 2012); doi: 10.1117/12.908751
Show Author Affiliations
Sergio Camacho-León, Tecnológico de Monterrey (Mexico)
Peter J. Gilgunn, Carnegie Mellon Univ. (United States)
Sergio O. Martínez-Chapa, Tecnológico de Monterrey (Mexico)
Gary K. Fedder, Carnegie Mellon Univ. (United States)


Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

© SPIE. Terms of Use
Back to Top