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Proceedings Paper

A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators
Author(s): Sergio Camacho-León; Peter J. Gilgunn; Sergio O. Martínez-Chapa; Gary K. Fedder
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Paper Abstract

This work reports the experimental validation of a novel one-dimensional microscanner. The composite cantilever device implements thermoelastic resonant actuation using temperature gradients induced across two frequency-selective directions as a strategy to increase operating speed and decrease damping. The device was fabricated using 0.35-μm CMOS technology and aspect ratio dependent etch modulation. Resonance peaks were measured around 6.4 and 44.7 kHz at atmospheric-pressure conditions; the power sensitivities (2.8 and 1.6 °/W) of the device may compromise its performance for low-power, large-angle applications. Ultimately, the device is suitable for applications requiring a variation from low- to high-stability conditions with increasing operating speed.

Paper Details

Date Published: 16 February 2012
PDF: 10 pages
Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520V (16 February 2012); doi: 10.1117/12.908751
Show Author Affiliations
Sergio Camacho-León, Tecnológico de Monterrey (Mexico)
Peter J. Gilgunn, Carnegie Mellon Univ. (United States)
Sergio O. Martínez-Chapa, Tecnológico de Monterrey (Mexico)
Gary K. Fedder, Carnegie Mellon Univ. (United States)

Published in SPIE Proceedings Vol. 8252:
MOEMS and Miniaturized Systems XI
Harald Schenk; Wibool Piyawattanametha; Wilfried Noell, Editor(s)

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