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Proceedings Paper

SOI-based trapezoidal waveguide with 45-degree microreflector for non-coplanar light bending
Author(s): Po-Kuan Shen; Chia-Chi Chang; Chin-Ta Chen; Hsu-Liang Hsiao; Yun-Chih Lee; Mount-Learn Wu
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Paper Abstract

SOI-based trapezoidal waveguide with 45° reflector for non-coplanar light bending is proposed and demonstrated. The proposed structures include 45° micro-reflector and silicon trapezoidal waveguide. Due to the SOI-based trapezoidal waveguide with 45° reflector, light wave can be coupled into silicon waveguide easily and have higher coupling efficiency. All of structures are fabricated using a single-step wet etching process. The RMS roughness of waveguide sidewall and 45° micro-reflector is about 30 nm. The coupling efficiency of proposed structure is -4.51 dB, and misalignment tolerance are 42 μm at horizontal direction and 41 μm at vertical direction. The multi-channel trapezoidal waveguide is also demonstrated. This device can transfer the light wave at the same time, and its cross talk is about -50 dB.

Paper Details

Date Published: 2 February 2012
PDF: 7 pages
Proc. SPIE 8266, Silicon Photonics VII, 82660K (2 February 2012); doi: 10.1117/12.908734
Show Author Affiliations
Po-Kuan Shen, National Central Univ. (Taiwan)
Chia-Chi Chang, National Central Univ. (Taiwan)
Chin-Ta Chen, National Central Univ. (Taiwan)
Hsu-Liang Hsiao, National Central Univ. (Taiwan)
Yun-Chih Lee, Centera Photonics Inc. (Taiwan)
Mount-Learn Wu, National Central Univ. (Taiwan)


Published in SPIE Proceedings Vol. 8266:
Silicon Photonics VII
Joel Kubby; Graham Trevor Reed, Editor(s)

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