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Proceedings Paper

Recent progress on diffraction-unlimited three-dimensional direct-laser-writing optical lithography
Author(s): Martin Wegener; Joachim Fischer; Tolga Ergin
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Date Published:
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Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824903; doi: 10.1117/12.908694
Show Author Affiliations
Martin Wegener, Karlsruher Institut für Technologie (Germany)
Joachim Fischer, Karlsruher Institut für Technologie (Germany)
Tolga Ergin, Karlsruher Institut für Technologie (Germany)


Published in SPIE Proceedings Vol. 8249:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
Winston V. Schoenfeld; Raymond C. Rumpf; Georg von Freymann, Editor(s)

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