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Proceedings Paper

Loss reduction of silicon slot waveguides with ALD grown thin films
Author(s): A. Säynätjoki; L. Karvonen; T. Alasaarela; D. Korn; L. Alloatti; A. Tervonen; R. Palmer; C. Koos; J. Leuthold; W. Freude; S. Honkanen
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Paper Abstract

We present our studies on slot waveguides clad with atomic layer deposition (ALD). We show reduction of propagation loss in silicon slot waveguides. With an ALD grown titania thin film cladding, propagation loss as low as 7 dB/cm for a deep-UV patterned slot waveguide is achieved.

Paper Details

Date Published: 2 February 2012
PDF: 7 pages
Proc. SPIE 8266, Silicon Photonics VII, 82660D (2 February 2012); doi: 10.1117/12.908640
Show Author Affiliations
A. Säynätjoki, Aalto Univ. (Finland)
L. Karvonen, Aalto Univ. (Finland)
T. Alasaarela, Beneq Oy (Finland)
D. Korn, Karlsruher Institut für Technologie (Germany)
L. Alloatti, Karlsruher Institut für Technologie (Germany)
A. Tervonen, Aalto Univ. (Finland)
R. Palmer, Karlsruher Institut für Technologie (Germany)
C. Koos, Karlsruher Institut für Technologie (Germany)
J. Leuthold, Karlsruher Institut für Technologie (Germany)
W. Freude, Karlsruher Institut für Technologie (Germany)
S. Honkanen, Aalto Univ. (Finland)
Univ. of Eastern Finland (Finland)


Published in SPIE Proceedings Vol. 8266:
Silicon Photonics VII
Joel Kubby; Graham Trevor Reed, Editor(s)

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