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Proceedings Paper

Polymer waveguides based on silicon optical benches
Author(s): Chin T. Chen; Po K. Shen; Chia C. Chang; Jen Y. Li; Hsu L. Hsiao; Yun C. Lee; Mount L. Wu
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Paper Abstract

In this paper, the proposed polymer waveguides based on silicon optical bench (SiOB) including a Si-based 45° microreflector and multi-channel polymer waveguides at cross-sectional dimension of 40 × 20 μm2 is demonstrated. The proposed 45° micro-reflector is fabricated on an orientation-defined (100) silicon substrate by using the anisotropic wetetching process. The optical performance of polymer waveguides with the propagation loss of -0.35 dB/cm and the insertion loss of -2.5 dB for the SiOB-based bending structure with polymer waveguides has been experimented. The multi-channels polymer waveguides based on the SiOB would be applied for the chip-to-chip optical interconnect.

Paper Details

Date Published: 1 February 2012
PDF: 6 pages
Proc. SPIE 8264, Integrated Optics: Devices, Materials, and Technologies XVI, 82640G (1 February 2012); doi: 10.1117/12.908580
Show Author Affiliations
Chin T. Chen, National Central Univ. (Taiwan)
Po K. Shen, National Central Univ. (Taiwan)
Chia C. Chang, National Central Univ. (Taiwan)
Jen Y. Li, National Central Univ. (Taiwan)
Hsu L. Hsiao, National Central Univ. (Taiwan)
Yun C. Lee, Centera Photonics Inc. (Taiwan)
Mount L. Wu, National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 8264:
Integrated Optics: Devices, Materials, and Technologies XVI
Jean Emmanuel Broquin; Gualtiero Nunzi Conti, Editor(s)

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