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Proceedings Paper

Hybrid optics for three-dimensional microstructuring of polymers via direct laser writing
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Paper Abstract

We present an immersion hybrid optics specially designed for focusing ultrashort laser pulses into a polymer for direct laser writing via two-photon polymerization. The hybrid optics enables well corrected focusing over a working distance range of 577 μm with a numerical aperture (NA) of 1.33 thereby causing low internal dispersion. We combine the concepts of an aplanatic solid immersion lens (ASIL) for achieving a high NA with the correction of aberrations with a diffractive optical element (DOE). To demonstrate the improvements for volume structuring of the polymer, we compare achievable feature sizes of structures written with our optics and a commercial available oil immersion objective (100x, NA=1.4).

Paper Details

Date Published: 15 February 2012
PDF: 7 pages
Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824910 (15 February 2012); doi: 10.1117/12.908555
Show Author Affiliations
Frank Burmeister, Friedrich-Schiller-Univ. Jena (Germany)
Fraunhofer Institute of Applied Optics and Precision Engineering (Germany)
Uwe D. Zeitner, Friedrich-Schiller-Univ. Jena (Germany)
Fraunhofer Institute of Applied Optics and Precision Engineering (Germany)
Stefan Nolte, Friedrich-Schiller-Univ. Jena (Germany)
Fraunhofer Institute of Applied Optics and Precision Engineering (Germany)
Andreas Tünnermann, Friedrich-Schiller-Univ. Jena (Germany)
Fraunhofer Institute of Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 8249:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
Winston V. Schoenfeld; Raymond C. Rumpf; Georg von Freymann, Editor(s)

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