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Proceedings Paper

Photo-induced trimming of chalcogenide-assisted silicon photonic circuits
Author(s): Andrea Melloni; Stefano Grillanda; Antonio Canciamilla; Carlo Ferrari; Francesco Morichetti; Michael Strain; Marc Sorel; Vivek Singh; Anu Agarwal; Lionel C. Kimerling
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Paper Abstract

We present an innovative and efficient technique for post-fabrication trimming of silicon photonic integrated circuits (PICs). Our approach exploits the high photosensitivity of chalcogenide glasses (ChGs) to induce local and permanent modifications of the optical properties and spectral responses of ChG-assisted silicon devices. We experimentally demonstrate the potential of this technique on ring resonator filters realized on a silicon-on-insulator platform, for which post-fabrication treatments enable to counteract the strong sensitivity to technological tolerances. Photosensitive ChGassisted silicon waveguides were realized by deposition of a As2S3 chalcogenide layer on top of conventional silicon channel waveguides. A resonant wavelength shift of 6.7 nm was achieved, largely exceeding the random resonance spread due to fabrication tolerances. Neither the ChG layer deposition, nor the trimming process introduces appreciable additional losses with respect to the bare silicon core waveguide. Performances of the trimming technique, such as speed and saturation effects, as well as nonlinear behavior and infrared writing issues are investigated and experimentally characterized.

Paper Details

Date Published: 2 February 2012
PDF: 8 pages
Proc. SPIE 8266, Silicon Photonics VII, 82660A (2 February 2012); doi: 10.1117/12.908521
Show Author Affiliations
Andrea Melloni, Politecnico di Milano (Italy)
Stefano Grillanda, Politecnico di Milano (Italy)
Antonio Canciamilla, Politecnico di Milano (Italy)
Carlo Ferrari, Politecnico di Milano (Italy)
Francesco Morichetti, Politecnico di Milano (Italy)
Michael Strain, Univ. of Glasgow (United Kingdom)
Marc Sorel, Univ. of Glasgow (United Kingdom)
Vivek Singh, Massachusetts Institute of Technology (United States)
Anu Agarwal, Massachusetts Institute of Technology (United States)
Lionel C. Kimerling, Massachusetts Institute of Technology (United States)

Published in SPIE Proceedings Vol. 8266:
Silicon Photonics VII
Joel Kubby; Graham Trevor Reed, Editor(s)

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