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Proceedings Paper

Rapid prototyping of biocompatible sensor chips by picoseconds laser structuring of a platinum/ tantalum pentoxide thin film layer system
Author(s): Gerhard Heise; Daniel Trappendreher; Florian Ilchmann; Robin S. Weiss; Bernhard Wolf; Heinz P. Huber
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Paper Abstract

Sensor chips to measure electrical signals of living cells are patterned with lasers from thin films of platinum as the conductive layer and tantalum pentoxide as the isolating layer. The selective ablations of the transparent tantalum pentoxide alone as well as the complete removal of both layers were investigated using picosecond laser pulses at different fluences. Ablation threshold values were measured for the irradiation either from the layer (front) side or from the glass (back) side. We observed complete and selective laser ablation of the films at low laser fluences.

Paper Details

Date Published: 30 January 2012
PDF: 7 pages
Proc. SPIE 8247, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII, 82470X (30 January 2012); doi: 10.1117/12.908495
Show Author Affiliations
Gerhard Heise, Munich Univ. of Applied Sciences (Germany)
Daniel Trappendreher, Technische Univ. München (Germany)
Munich Univ. of Applied Sciences (Germany)
Florian Ilchmann, Technische Univ. München (Germany)
Robin S. Weiss, Technische Univ. München (Germany)
Bernhard Wolf, Technische Univ. München (Germany)
Heinz P. Huber, Munich Univ. of Applied Sciences (Germany)

Published in SPIE Proceedings Vol. 8247:
Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XII
Alexander Heisterkamp; Michel Meunier; Stefan Nolte, Editor(s)

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