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Proceedings Paper

Integrated MEMS-tunable VCSELs for reconfigurable optical interconnects
Author(s): Benjamin Kögel; Pierluigi Debernardi; Petter Westbergh; Johan S. Gustavsson; Åsa Haglund; Erik Haglund; Jörgen Bengtsson; Anders Larsson
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Paper Abstract

A simple and low-cost technology for tunable vertical-cavity surface-emitting lasers (VCSELs) with curved movable micromirror is presented. The micro-electro-mechanical system (MEMS) is integrated with the active optical component (so-called half-VCSEL) by means of surface-micromachining using a reflown photoresist droplet as sacrificial layer. The technology is demonstrated for electrically pumped, short-wavelength (850 nm) tunable VCSELs. Fabricated devices with 10 μm oxide aperture are singlemode with sidemode suppression >35 dB, tunable over 24 nm with output power up to 0.5mW, and have a beam divergence angle <6 °. An improved high-speed design with reduced parasitic capacitance enables direct modulation with 3dB-bandwidths up to 6GHz and error-free data transmission at 5Gbit/s. The modulation response of the MEMS under electrothermal actuation has a bandwidth of 400 Hz corresponding to switching times of about 10ms. The thermal crosstalk between MEMS and half-VCSEL is negligible and not degrading the device performance. With these characteristics the integrated MEMS-tunable VCSELs are basically suitable for use in reconfigurable optical interconnects and ready for test in a prototype system. Schemes for improving output power, tuning speed, and modulation bandwidth are briefly discussed.

Paper Details

Date Published: 7 February 2012
PDF: 7 pages
Proc. SPIE 8276, Vertical-Cavity Surface-Emitting Lasers XVI, 82760Q (7 February 2012); doi: 10.1117/12.908420
Show Author Affiliations
Benjamin Kögel, Chalmers Univ. of Technology (Sweden)
Pierluigi Debernardi, Istituto di Elettronica e di Ingegneria dell'Informazione e delle Telecomunicazioni, CNR (Italy)
Petter Westbergh, Chalmers Univ. of Technology (Sweden)
Johan S. Gustavsson, Chalmers Univ. of Technology (Sweden)
Åsa Haglund, Chalmers Univ. of Technology (Sweden)
Erik Haglund, Chalmers Univ. of Technology (Sweden)
Jörgen Bengtsson, Chalmers Univ. of Technology (Sweden)
Anders Larsson, Chalmers Univ. of Technology (Sweden)


Published in SPIE Proceedings Vol. 8276:
Vertical-Cavity Surface-Emitting Lasers XVI
Chun Lei; Kent D. Choquette, Editor(s)

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