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Proceedings Paper

A CMOS imager using focal-plane pinhole effect for confocal multibeam scanning microscopy
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Paper Abstract

A CMOS imager for confocal multi-beam scanning microscopy, where the pixel itself works as a pinhole, is proposed. This CMOS imager is suitable for building compact, low-power, and confocal microscopes because the complex Nipkow disk with a precisely aligned pinhole array can be omitted. The CMOS imager is composed of an array of sub-imagers, and can detect multiple beams at the same time. To achieve a focal-plane pinhole effect, only one pixel in each subimager, which is at the conjugate position of a light spot, accumulates the photocurrent, and the other pixels are unread. This operation is achieved by 2-dimensional vertical and horizontal shift registers. The proposed CMOS imager for the confocal multi-beam scanning microscope system was fabricated in 0.18-μm standard CMOS technology with a pinned photodiode option. The total area of the chip is 5.0mm × 5.0mm. The number of effective pixels is 256(Horizontal) × 256(Vertical). The pixel array consists of 32(H) × 32(V) sub-imagers each of which has 8(H) × 8(V) pixels. The pixel is an ordinary 4-transistor active pixel sensor using a pinned photodiode and the pixel size is 7.5μm × 7.5μm with a fillfactor of 45%. The basic operations such as normal image acquisition and selective pixel readout were experimentally confirmed. The sensitivity and the pixel conversion gain were 25.9 ke-/lx•sec and 70 μV/e- respectively.

Paper Details

Date Published: 15 February 2012
PDF: 7 pages
Proc. SPIE 8298, Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII, 829807 (15 February 2012); doi: 10.1117/12.908285
Show Author Affiliations
Min-Woong Seo, Shizuoka Univ. (Japan)
An Wang, Shizuoka Univ. (Japan)
Zhuo Li, Shizuoka Univ. (Japan)
Keita Yasutomi, Shizuoka Univ. (Japan)
Keiichiro Kagawa, Shizuoka Univ. (Japan)
Shoji Kawahito, Shizuoka Univ. (Japan)


Published in SPIE Proceedings Vol. 8298:
Sensors, Cameras, and Systems for Industrial and Scientific Applications XIII
Ralf Widenhorn; Valérie Nguyen; Antoine Dupret, Editor(s)

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