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Proceedings Paper

Planar refractive microlens arrays with high fill-factor fabricated by polymer replication technique
Author(s): Minwoo Nam; Sang Sik Yang; Kee-Keun Lee
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Paper Abstract

Planar refractive microlens arrays (MLAs) with high fill-factor were developed utilizing polymer replication technique. By using isotropically wet-etched quartz as a master mold, we obtained uniformly arrayed plano-concave patterns on poly(dimethylsiloxane) (PDMS) with a pitch, height, and radius of curvature of 132, 60, and 104.5 μm, respectively. A high refractive index polymer was coated on the patterned PDMS as a light refraction layer. The measured focal length of the fabricated MLA was about 900 μm, showing well correspondence with the simulated one. The diameter of the focused beam spots was 5.4 μm, denoting the excellent light focusing ability.

Paper Details

Date Published: 15 February 2012
PDF: 7 pages
Proc. SPIE 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, 825006 (15 February 2012); doi: 10.1117/12.908229
Show Author Affiliations
Minwoo Nam, Ajou Univ. (Korea, Republic of)
Sang Sik Yang, Ajou Univ. (Korea, Republic of)
Kee-Keun Lee, Ajou Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 8250:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI
Sonia M. García-Blanco; Rajeshuni Ramesham, Editor(s)

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