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Proceedings Paper

Radio frequency plasma pre-treatment for selective electroless Ag coating of three-dimensional SU-8 microstructures
Author(s): Andrew A. Bettiol; Yuanjun Yan; Ee Jin Teo; Hendrix Tanoto; Jinghua Teng
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Paper Abstract

Three dimensional metamaterials are fabricated using direct laser writing in SU-8 polymer followed by an electroless coating process. A method has been developed to allow for selective electroless plating of SU-8 microstructures with a smooth conformal coating of Ag. The process utilizes radio frequency plasma pretreatment to modify the SU-8 surface so that Ag ions can nucleate on the surface, leaving the substrate uncoated. An array of split ring resonators and other 3D microstructures are used to demonstrate how the technique can be applied to metamaterials applications.

Paper Details

Date Published: 15 February 2012
PDF: 7 pages
Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824916 (15 February 2012); doi: 10.1117/12.908228
Show Author Affiliations
Andrew A. Bettiol, National Univ. of Singapore (Singapore)
Yuanjun Yan, National Univ. of Singapore (Singapore)
Ee Jin Teo, A*STAR Institute of Materials Research and Engineering (Singapore)
Hendrix Tanoto, A*STAR Institute of Materials Research and Engineering (Singapore)
Jinghua Teng, A*STAR Institute of Materials Research and Engineering (Singapore)


Published in SPIE Proceedings Vol. 8249:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V
Winston V. Schoenfeld; Raymond C. Rumpf; Georg von Freymann, Editor(s)

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