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Proceedings Paper

Highly-sensitive anisotropic porous silicon based optical sensors
Author(s): Jesús Álvarez; Paolo Bettotti; Neeraj Kumar; Isaac Suárez; Daniel Hill; Juan Martínez-Pastor
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Paper Abstract

The modeling, fabrication and characterization of PSi fabricated from both (110) and (100) surface oriented silicon for optical sensing is thoroughly reported. First, based on the generalized Bruggeman method, the birefringence and sensitivity of the fabricated membranes were calculated as a function of the fabrication parameters such as porosity and pore sizes; and external effects, such as the pores surface oxidation. Thereafter we report on the fabrication of PSi membranes from (110) and (100) surface oriented silicon with pore sizes in the range of 50 - 80 nm, and the characterization of their birefringence using a polarimetric setup. Their sensitivities were determined by filling the pores with several liquids having different refractive index. As a result, sensitivities as high as 1407 nm/RIU were obtained for the (110) samples at a 1500 nm wavelength and 382 nm/RIU for the (100) samples at the same wavelength.

Paper Details

Date Published: 1 February 2012
PDF: 8 pages
Proc. SPIE 8212, Frontiers in Biological Detection: From Nanosensors to Systems IV, 821209 (1 February 2012); doi: 10.1117/12.908214
Show Author Affiliations
Jesús Álvarez, Univ. of Valencia (Spain)
Paolo Bettotti, Univ. of Trento (Italy)
Neeraj Kumar, Univ. of Trento (Italy)
Isaac Suárez, Univ. of Valencia (Spain)
Daniel Hill, Univ. of Valencia (Spain)
Juan Martínez-Pastor, Univ. of Valencia (Spain)


Published in SPIE Proceedings Vol. 8212:
Frontiers in Biological Detection: From Nanosensors to Systems IV
Benjamin L. Miller; Philippe M. Fauchet, Editor(s)

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