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Proceedings Paper

Surface topography and optical performance measurement of microlenses used in high power VCSEL systems
Author(s): I. Erichsen; S. Krey
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Paper Abstract

The demand for lasers with specific intensity distributions has led to the development of high power VCSEL systems. These consist of arrays of high power VCSELs combined with microlenses allowing for intensity distributions tailored to the needs of each specific application. A Shack-Hartmann based instrument has been developed for the measurement of these lenses in reflection as well as in transmission. In addition the form tools used for the microlens production can be measured with this set up. The comparison of measured surface profiles and optical properties with the particular design values then allows for optimization of the manufacturing process.

Paper Details

Date Published: 7 February 2012
PDF: 9 pages
Proc. SPIE 8276, Vertical-Cavity Surface-Emitting Lasers XVI, 82760C (7 February 2012); doi: 10.1117/12.908130
Show Author Affiliations
I. Erichsen, Trioptics GmbH (Germany)
S. Krey, Trioptics GmbH (Germany)


Published in SPIE Proceedings Vol. 8276:
Vertical-Cavity Surface-Emitting Lasers XVI
Chun Lei; Kent D. Choquette, Editor(s)

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