Share Email Print
cover

Proceedings Paper

Fabrication of microstructures with continuous surface profiles and very large sag heights by laser lithography
Author(s): Jens Dunkel; Frank Wippermann; Andreas Bräuer
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The fabrication of microstructures with continuous surface profiles and very large sag heights by a laser lithographic process on a commercially available laser lithography system is presented. The fabricated structures possess sag heights up to 60 μm with a pitch of 400 μm. Fabrication imperfections due to nonlinearities in the photoresist response and the isotropy of the development process have been compensated in the exposure data to minimize profile deviations. Therefore, an empirical process model is proposed based on experimentally determined development rates. The achievable accuracy of the data pre shape and exposure method as well as their limitations are discussed.

Paper Details

Date Published: 7 February 2012
PDF: 7 pages
Proc. SPIE 8248, Micromachining and Microfabrication Process Technology XVII, 824807 (7 February 2012); doi: 10.1117/12.907337
Show Author Affiliations
Jens Dunkel, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Friedrich-Schiller-Univ. Jena (Germany)
Frank Wippermann, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)
Andreas Bräuer, Fraunhofer Institute for Applied Optics and Precision Engineering (Germany)


Published in SPIE Proceedings Vol. 8248:
Micromachining and Microfabrication Process Technology XVII
Mary Ann Maher; Paul J. Resnick, Editor(s)

© SPIE. Terms of Use
Back to Top