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Proceedings Paper

Green line-shaped focus and multiple-foci geometry for photovoltaic manufacturing and other applications on silicon
Author(s): Mikhail Ivanenko; Klaus Bagschik; Wyacheslav Grimm; Alexei Krasnaberski
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Paper Abstract

Ultra-narrow line-shaped laser focuses are required for different material surface applications. We discuss the optical solutions, like anisotropic transformation and homogenization of a multimode laser beam, and present examples of the line-beam shaping systems for industrial processing. These systems cover range from 13 to 400 mm of the line length by about 10 μm line width. By the lengths above 200 - 300 mm the energy of several green lasers has to be bundled in the system. For a selective doping of solar cell emitter underneath the front contacts we have developed the optics, which provides instead of the continuous line-shaped focus a number of short line-segments (dashed line). Each of these segments is 14 ìm wide and 220 μm (flat topped) long. The 17-segment line spans 33.5 mm and can be extended to cover a whole standard 6" Si wafer. The light source is an Yb:YAG 515 nm disc laser (TRUMPF).

Paper Details

Date Published: 15 February 2012
PDF: 6 pages
Proc. SPIE 8243, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII, 824311 (15 February 2012); doi: 10.1117/12.907306
Show Author Affiliations
Mikhail Ivanenko, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Klaus Bagschik, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Wyacheslav Grimm, LIMO Lissotschenko Mikrooptik GmbH (Germany)
Alexei Krasnaberski, LIMO Lissotschenko Mikrooptik GmbH (Germany)


Published in SPIE Proceedings Vol. 8243:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVII
Guido Hennig; Xianfan Xu; Bo Gu; Yoshiki Nakata, Editor(s)

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