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Proceedings Paper

Research on the property of electro-deposited Ni-Fe-SiC alloy for MEMS
Author(s): Xiaohu Zheng; Feng Gu
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Paper Abstract

Electrolytic codeposition technique was adopted in the deposition of Ni-Fe-SiC composite coating on stainless steel substrate, using nickel alloyed with iron as the binder phase with SiC as dispersed particles. The results indicated that the deposit with SiC nanoparticles was level and compact; the crystal-planes of the deposit were (111), (220) and (200). The resistivity of deposit was about 30μΩ•cm. when the Fe(wt.%) ranged from 10% to 50% in the deposit, the electrodeposit Ni-20%Fe-SiC has a strong paramagnetism effect with the smallest coercivity of 2.75×10-2 A/m. The remanence showed a monotonic decrease with the increasing iron content in deposit. Which proved that the electroformed Ni-Fe-SiC alloy has good electromagnetic property and higher corrosion resistance (with the corrosion rate 0.17 mg/dm2 per hour) than those of electroforming Ni-Fe alloy. It is a promising material in the fabrication of micro actuator.

Paper Details

Date Published: 28 November 2011
PDF: 4 pages
Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 820214 (28 November 2011); doi: 10.1117/12.907055
Show Author Affiliations
Xiaohu Zheng, Huaiyin Institute of Technology (China)
Feng Gu, Huaiyin Institute of Technology (China)


Published in SPIE Proceedings Vol. 8202:
2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology
Hoi Sing Kwok; Fengzhou Fang; Lian Xiang Yang; Chongxiu Yu; Albert A. Weckenmann; Yanbing Hou; Jinxue Wang; Ji Zhao; Jinxue Wang; Peter Zeppenfeld; Boyu Ding; Boyu Ding; Liquan Dong; Liquan Dong; Jack K. Luo; Boyu Ding; Liquan Dong; Jinxue Wang, Editor(s)

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