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Proceedings Paper

Inverse Hartmann surface form measurement based on spherical coordinates
Author(s): Jian-rong Ma; Qun Hao; Qiu-dong Zhu; Yao Hu
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Paper Abstract

Various methods for surface form measurement of aspheric and complex optics exist at present. Each method is just suitable for several limited optic surface form measurement. Hartmann measurement is a method that reconstructs the surface form of a test mirror from form slope. It gives quantitative evaluation of a test mirror in a short time. Compared with interferometry, it has advantages such as relatively simple setup, good anti-disturbance property and low cost. However, it is difficult for conventional Hartmann and Shack-Hartmann methods to increase their measurement dynamic range and resolution simultaneously, and they can not be used to measure steep aspheric surface form. A novel method named inverse Hartmann surface form measurement based on spherical coordinates is presented. The method increases the measurement dynamic range and resolution simultaneously. It reduces the measured ray slope, increases the measurement range, and its accuracy of form error is higher than that in rectangular coordinates. It can be applied in online optic product evaluation rapidly and accurately with low cost.

Paper Details

Date Published: 30 November 2011
PDF: 8 pages
Proc. SPIE 8201, 2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 820126 (30 November 2011); doi: 10.1117/12.906981
Show Author Affiliations
Jian-rong Ma, Beijing Institute of Technology (China)
Qun Hao, Beijing Institute of Technology (China)
Qiu-dong Zhu, Beijing Institute of Technology (China)
Yao Hu, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 8201:
2011 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems
Xinyong Dong; Xiaoyi Bao; Perry Ping Shum; Tiegen Liu, Editor(s)

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