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Proceedings Paper

Accuracy of a multiple height-transfer interferometric technique for absolute distance metrology
Author(s): Hao Yu; Carl Aleksoff; Jun Ni
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Paper Abstract

A multiple height-transfer interferometric technique was developed to increase the absolute distance measurement capability of a metrology system that uses a tunable laser. Using multiple accurately calibrated reference heights, this technique relaxes the requirement of knowing accurate wavelength information for multiple wavelength interferometry while maintaining its advantages. We present an uncertainty analysis, analyze the primary sources of uncertainties limiting the performance of this technique and discuss how errors can be minimized. Measurement results of 3D-images obtained from a variety of objects are presented. The measurement uncertainty is experimentally demonstrated to be smaller than 0.2 μm over 50 mm for two discontinuous surfaces.

Paper Details

Date Published: 29 November 2011
PDF: 12 pages
Proc. SPIE 8202, 2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology, 820206 (29 November 2011); doi: 10.1117/12.906909
Show Author Affiliations
Hao Yu, Univ. of Michigan (United States)
Carl Aleksoff, Coherix, Inc. (United States)
Jun Ni, Univ. of Michigan (United States)


Published in SPIE Proceedings Vol. 8202:
2011 International Conference on Optical Instruments and Technology: Solid State Lighting and Display Technologies, Holography, Speckle Pattern Interferometry, and Micro/Nano Manufacturing and Metrology
Hoi Sing Kwok; Fengzhou Fang; Lian Xiang Yang; Chongxiu Yu; Albert A. Weckenmann; Yanbing Hou; Jinxue Wang; Ji Zhao; Jinxue Wang; Peter Zeppenfeld; Boyu Ding; Boyu Ding; Liquan Dong; Liquan Dong; Jack K. Luo; Boyu Ding; Liquan Dong; Jinxue Wang, Editor(s)

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